| http://www.w3.org/ns/prov#value | - r, semiconductor device including the transistor, and manufacturing method of the transistor and the semiconductor deviceUS8253135Mar 18, 2010Aug 28, 2012Semiconductor Energy Laboratory Co., Ltd.Semiconductor device, display device, and electronic applianceUS8278657 *Feb 4, 2010Oct 2, 2012Semiconductor Energy Laboratory Co., Ltd.Transistor, semiconductor device including the transistor, and manufa
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