| http://www.w3.org/ns/prov#value | - Preferred salts are those consisting of ammonium (NH4 +) or ammonium salts of primary, secondary or tertiary alkyl amines (e.g. NRH3 +, NR2H2 +, NR3H+, where R is an alkyl or fluoroalkyl moiety) with acidic compounds as defined above, whose free amine have a boiling point of less than 130??? C. preferably less than 100??? C. Positive photoresists, which are developed with aqueous alkaline solution
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