| http://www.w3.org/ns/prov#value | - rradiation is conducted in such a manner that an irradiation area of one pulse is partly overlapped with a next pulse; forming a plurality of thin film transistors in said pixel portion using said semiconductor film, each of said thin film transistors having an active region including source and drain regions and a channel region interposed therebetween, and a first line connecting source and drai
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