| http://www.w3.org/ns/prov#value | - Brevet US6127908 - Microelectro-mechanical system actuator device and reconfigurable circuits ... - Google???BrevetsRecherche Images Maps Play YouTube Actualit???s Gmail Drive Plus ??Connexion Recherche avanc???e dans les brevets BrevetsA microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a
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