| http://www.w3.org/ns/prov#value | - retaining rings, and methods for planarizing micro-device workpiecesUS6893332Aug 30, 2004May 17, 2005Micron Technology, Inc.Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesUS6945855Aug 29, 2002Sep 20, 2005Micron Technology, Inc.Method and apparatus for cleaning a web-based chemical mechanical planarization systemUS6949011
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