| http://www.w3.org/ns/prov#value | - Examples of the silane compound include a compound represented by the chemical formula RaSiX4???a (wherein a represents an integer of from 0 to 3; R represents a hydrogen atom or an organic group, such as an alkyl group and an alkenyl group; and X represents a hydrolytic group, such as a chlorine atom, a methoxy group and an ethoxy group), and any type of chlorosilane, alkoxysilane, silazane and a
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