| http://www.w3.org/ns/prov#value | - Examples of dielectric materials include conventional oxides, nitrides, oxynitrides, and other dielectrics, such as borophosphosilicate glass (BPSG), borosilicate glass (BSG), phosphosilicate glass, spin-on glass (SOG), silicon oxide, P-doped silicon oxide (P-glass), silicon nitride (Six Ny), silicon dioxide, a conventional oxide/nitride/oxide structure, silicon oxynitride (e.g. of the general for
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