About: http://webisa.webdatacommons.org/295223177

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Practically, however, there is a limit to increase the thickness of an insulating film, and it is impossible to make the wafer surface completely flat.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com