| http://www.w3.org/ns/prov#value | - rsor cyclical deposition systemUS740251829 Sep 200522 Jul 2008Micron Technology, Inc.Atomic layer deposition methodsUS740253426 Ago 200522 Jul 2008Applied Materials, Inc.Pretreatment processes within a batch ALD reactorUS742940210 Dic 200430 Sep 2008Applied Materials, Inc.Depositing a barrier layer on the substrate, such as a titanium or tantalum containing barrier layer and depositing a ruthenium
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