| http://www.w3.org/ns/prov#value | - r material from silicon, silicon carbide, metals or alloysUS5629086 *5 juin 199513 mai 1997Sanyo Electric Co., Ltd.Substrate is stainless steel, nickel, aluminum or alloy of ni or al; intermediate layer is mainly composed of carbon, ruthenium, silicon or germanium or is layer of ru, si or ge mixed with carbon, nitrogen and/or oxygen with gradientUS5725573 *10 avr. 199610 mars 1998Southwest Researc
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