About: http://webisa.webdatacommons.org/295398516

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the smallest structures resolved by the mask are e.g. 1.5 ??m, defects of the mask with a diameter of 0.5 ??m and more have to be located; with structures of 0.75 ??m the detection limit is reduced accordingly to 0.25 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com