About: http://webisa.webdatacommons.org/295400090

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After sputtering of the layer including titanium oxide, an ion beam source(s) is used to implant at least carbon ions into the titanium oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com