About: http://webisa.webdatacommons.org/295488741

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If there are foreign particles on the chromium pattern before forming the phase shift film, defects, such as bubbles and cracks, will beformed in the phase shift film, and will cause defects in a printed image of the reticle.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com