About: http://webisa.webdatacommons.org/295584303

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Each of the conductive films 22 a and 22 b may be formed of an element selected from Ta, W, Ti, Mo, Al, and Cu, or an alloy or compound material mainly containing any of these elements.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com