About: http://webisa.webdatacommons.org/29570145

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In embodiments described herein the second terminals of the transistors and the word lines are both planarized using a planarization process, such as CMP, so that the top surfaces of the second terminals and the word lines are co-planar.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com