About: http://webisa.webdatacommons.org/295762846

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	as a mask aligner, a measuring apparatus or an examining apparatus such as a wafer prober, and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca