| http://www.w3.org/ns/prov#value | - Examples of fluorine sources gases suitable for the process described herein include: HF (hydrofluoric acid), F2 (fluorine), NF3 (nitrogen trifluoride), SF6 (sulfur hexafluoride), FNO (nitrosyl fluoride), C3F3N3 (cyanuric fluoride), C2F2O2 (oxalyl fluoride), perfluorocarbons such as CF4, C2F6, C3F8, C4F8 etc., hydrofluorocarbons such as CHF3 and C3F7H etc., oxyfluorocarbons such as C4F8O (perfluor
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