About: http://webisa.webdatacommons.org/296071983

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To form the oxide layer 12, any of film forming methods such as sputtering, plasma CVD and application may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk