About: http://webisa.webdatacommons.org/29608756

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One of wafer carriers 166???172 is lowered over the wafer and a mechanism, such as a vacuum, is used so that the carrier may receive and engage the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com