About: http://webisa.webdatacommons.org/296213779

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the first substrate 500 may be covered with an insulating film containing such as silicon oxide, silicon nitride, silicon nitride-oxide and then, the metal film 501 may be formed thereover.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com