About: http://webisa.webdatacommons.org/296224837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More specifically, the present invention describes embodiment of an ALD apparatus for preparing hafnium-containing compounds used in a variety of applications, including high-k dielectric materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es