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http://webisa.webdatacommons.org/296397982
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
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Note that, the film is not necessary to be limited to an amorphous silicon film, a semiconductor film including an amorphous structure (including a micro crystalline semiconductor film) may be used.
http://www.w3.org/ns/prov#wasQuotedFrom
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