PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • More specifically, techniques to improve characteristics of processed substrates are disclosed.BACKGROUND OF THE INVENTIONSemiconductor processing typically includes various techniques performed on a substrate (e.g., a wafer) to form electronic devices such as integrated circuits.
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  • freepatentsonline.com