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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably the thin insulating layer has a thickness of 8 to 12 nM. This insulating layer may comprise of common insulating materials, examples including silicon oxide, silicon nitride and combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com