About: http://webisa.webdatacommons.org/296806931

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Prior to the forming of the self-assembled film, pretreatment, such as ultraviolet ray irradiation or cleaning with a solvent in the cleaning step (S1), is preferably conducted for the surface of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com