About: http://webisa.webdatacommons.org/296981256

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The piezo-TFT cantilever of claim 1 wherein the substrate is a material selected from the group including glass, polymer, quartz, metal foil, Si, sapphire, ceramic, and compound semiconductor materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com