About: http://webisa.webdatacommons.org/297031569

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The base film may be formed using an insulating film such as silicon oxide, silicon nitride, and silicon nitride oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com