About: http://webisa.webdatacommons.org/297150376

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The workpiece is then transported to a metrology unit in step 606 for measuring characteristics such as film thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com