PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The silicon precursor compound has the structure SiX4, Si(NR2)4, Si(OH)a(OR)4-a or SiHb(OR)4-b wherein each R is an alkyl group, each X is independently a halogen atom, and a and b are numbers from 0-4.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com