About: http://webisa.webdatacommons.org/297497759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography is a technique used in making integrated circuits that uses light patterns and typically organic polymers (photoresist materials) to develop fine-scaled patterns on a substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com