About: http://webisa.webdatacommons.org/29750212

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Any suitable dry stripping process can be used, including O2 plasma ashing, ozone gas phase-treatment, fluorine plasma treatment, hot H2 gas treatment (described in U.S. Pat. No. 5,691,117 incorporated herein by reference), and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au