About: http://webisa.webdatacommons.org/297523490

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is particularly suitable for silicon wafers which are coated with a thin film of an appropriate metallic nitride by a chemical vapor deposition or in a plasma activated deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com