| http://www.w3.org/ns/prov#value | - The sacrificial layer (SL) 18 x can be an insulating or conductive material that is chemically different from metal layer 10 x and a low-k material 26 x that is later deposited (as described below), and can include but is not limited to silicon dioxide (SiO2), silicon nitride (SiN), aluminum oxide (Al2O3), silicon carbide (SiC), polymers, or other organic materials.
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