About: http://webisa.webdatacommons.org/297875218

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate is preferably formed of an insulating material, such as silicon (semiconductor wafer), glass or sapphire.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca