About: http://webisa.webdatacommons.org/297882734

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a planarization process, such as CMP, ispreformed to form a contact plug 114, as shown in FIG. 3B.The formation of the ferroelectric capacitor, with reference to FIGS. 3C-3F will now be described.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com