About: http://webisa.webdatacommons.org/29794551

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, third dielectric layer 160 is a material that may be selectively etched (e.g., removed) in the presence of second dielectric layer 150.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com