About: http://webisa.webdatacommons.org/297967354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the first mask 120 and the hard mask layer 160 are formed using polysilicon, the sacrificial layer 140 may be formed using a metal oxide such as tungsten oxide, titanium oxide, tantalum oxide, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com