About: http://webisa.webdatacommons.org/298029544

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 83 wherein said layer is a semiconductor material, and said first and second species are dopant impurities of opposite conductivity types relative to said semiconductor material. 85.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com