About: http://webisa.webdatacommons.org/299152178

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method as recited in claim 1, wherein the structure is an isolated feature selected from the group consisting of a line, a hole, a via, a trench and a overlay registration marking.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com