About: http://webisa.webdatacommons.org/299322009

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need for an improved process and apparatus which is capable of depositing defect-free thin layers on a substrate in an economical manner.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr