About: http://webisa.webdatacommons.org/299601338

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Refractory metals such as Ta, TaN or W can be used, although TaN is preferred over other hardmask materials because of its improved adhesion to silicon dioxide (80).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com