About: http://webisa.webdatacommons.org/29979619

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Having thus described an embodiment of the present invention, it is the principal object hereof to provide a robotic IPA vapor dryer for the drying of substrates or wafers such as silicon wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com