About: http://webisa.webdatacommons.org/299917561

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A layer 54 of an electrically insulating material such as phosphosilicate glass, boron-doped phosphosilicate glass, or plasma silicon nitride is typically deposited on the upper surface of the structure at this point.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com