| http://www.w3.org/ns/prov#value | - Although the embodiments below will be discussed in terms of using conventional E-beam scans with one type of specialized E-beam inspection technique, electron beam induced current (EBIC), to induce and measure low current leakage levels due to dislocations, pipes and other defects, the invention is not limited to the use of an electron beam to induce current in the test circuits.
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