About: http://webisa.webdatacommons.org/300032251

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, other types of etching chemistries and types of etching processes such as plasma or dry etching techniques may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com