About: http://webisa.webdatacommons.org/300117859

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, the reservoirs can be etched into the substrate by dry etching techniques such as reactive ion etching or ion beam etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr