About: http://webisa.webdatacommons.org/300150183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the exemplary cluster 2 identifies the wafers 4 using the OCR system 44, other techniques may be used to identify the wafers 4, such as for example, location within the cassette 24, or other methods as are known.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de