About: http://webisa.webdatacommons.org/300188354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, it is considered that gettering impurities, such as oxygen or the like, in the substrate by the diffusion source was not sufficient.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com