About: http://webisa.webdatacommons.org/300289101

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, when processing a particularly large wafer, e.g., a 12-inch wafer, a large difference occurs in plasma processing between the central portion and the peripheral portion of the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es