About: http://webisa.webdatacommons.org/300329392

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, the wash reagent storage 242 stores wash reagents which cause a chelating agent to disassociate with a ligand such as the metal ions implanted into the polishing endpoint layer 118.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com